Energy-Dispersive Spectroscopy (EDS)

Technical Overview

Energy-dispersive X-ray spectroscopy (EDS, EDX, EDXS or XEDS) is used to obtain compositional information about a sample. When coupled with SEM TEM or STEM, the electron beam is used both to image the sample, but also to generate characteristic X-rays resulting from the sample’s excitation by the beam. When an atom’s inner shell is hit by an incident beam electron, an inner-shell electron can be displaced, creating an electron hole. If an outer-shell electron then moves to the lower-energy inner-shell to fill the vacancy, the difference in energies can give way to an X-ray with an energy that is characteristic of both the atom and electron shell transition. By equipping the EM column with a strategically positioned X-ray detector, the characteristic X-rays emitted from the sample can be recorded and the signal converted to a mapping of the samples surface composition using dedicated analysis software. This data is incredibly useful to many material scientists as it provides information on the spatial distribution of chemical elements, rather than average bulk composition alone.

How LVEM does EDS

Energy-Dispersive Spectroscopy mode is available with the LVEM25E microscope and is easily accessible from SEM TEM and STEM modes. The x-ray energy data is recorded by the XFlash® 630 series from Bruker, then processed and attributed to the sample by a dedicated ESPRIT software. Spectroscopy Data can be visualized as elemental line scans or elemental mapping. Adding Bruker EDS to your LVEM turns it into a very powerful analytical tool allowing a multitude of capabilities using advanced microanalysis features for elemental analysis.
for more details, please visit the product details pages for the LVEM25E.

Bruker EDS – XFlash® 630 

XFlash® 630 series from the expansive line of Bruker EDS systems uses the ESPRIT Compact software for simple or advanced Elemental Micro-Analysis.  The Bruker ESPRIT Compact software provides numerous capabilities for probing the samples composition, thickness and mapping.

  • High speed embedded type SDD Dectector (No LN2 required)

  • Energy resolution: Less than 129 eV (at Mn Ka)

  • Detector area: 30mm

  • Element detection range: B(5) – Am(95)

  • Maximum input count rate: > 150 kcps

  • Software: Qualitative or Quantitative  Analysis

  • Analysis Modes:  Point, Circle, Polygon, Line Scan, Mapping


  • Fast and high-resolution mapping analysis with Bruker’s HyperMap

  • Mapping provides the function of analyzing the distribution of elements

  • Maps of individual element distribution can be broken out and saved separately

  • Spectra for each pixel are saved in a database for later recall and manipulation of point or line scan analysis

  • Various user settings for saving formats, colors, depth, filters, and more


EDS data in LVEM25E requires no additional preparation to that of conventional SEM/STEM. Grids, fixation media, stains and coatings will affect total elemental composition and should be taken into consideration when preparing samples for EDS analysis.  For more details, please visit our page on sample preparation.

Visit our photo gallery for a better look at what energy dispersive spectroscopy within the LVEM25E microscope can do for you. 


LVEM 25E Electron Microscope

  • Materials evaluation and identification
  • Contaminants
  • Failure analysis
  • Contamination identification
  • Unknowns identification
  • Quality control screening
  • Material verification
  • Nanotubes
  • Biologic Tissue
  • Polymers
  • Quantum Dots
  • Nanocages
  • Fullerenes
  • Silver Nanoparticles
  • Gold Nanoparticles
  • Nanofibers
  • Dendrimers
  • Viruses and Phages
  • Liposomes
  • Proteins
  • Nucleic Acids

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