
| Electron gun | Schottky field emission gun |
| Specimen size | Standard Ø 3.05 mm TEM grids |
| Objective lens | Magnetostatic |
| Projective lens | Electrostatic |
| Specimen movement | x, y: ± 1 mm | z: ± 0.5 mm |
| Tilt holder | ± 20° |
| Specimen exchange time | approx. 2 min |
| VACUUM | |
| AIRLOCK SYSTEM | |
| Diaphragm and turbomolecular pump | 10-5 mbar |
| OBJECT SPACE | |
| Ion getter pump | 10-8 mbar |
| ELECTRON GUN | |
| Ion getter pump | 10-9 mbar |
| TEM | ||
| Nominal accelerating voltage | 25 kV | |
| Resolution | 1.0 nm | |
| Total magnification | Display 3,800 – 3,000,000× Sensor 160-64,000x | |
| Magnification in Low mag regime | Display* 1,300× Sensor 54x | |
| Field of view | 100 – 0.25 μm | |
| Field of view in Low mag regime | 225 μm | |
| *valid for image on display at binning 2×2 | ||
| ELECTRON DIFFRACTION | ||
| Probe size | 500 – 8,000 nm | |
| Camera length (binning 2x2) | 2,000 – 5,000 pixels | |
| Camera constant (binning 2x2) | 17 – 40 nm pixels | |
| STEM | STEM 10 | STEM 15 |
| Nominal accelerating voltage | 10 kV | 15 kV |
| Resolving power | 1.0 nm | 1.0 nm |
| Magnification | 1,150-3,600,000× | 1,300-4,600,000x |
| Maximum field of view | 81 μm | 56 μm |
| SEM (BSE DETECTOR) | SEM 15 | |
| Nominal accelerating voltage | 15 kV | |
| Resolving power | 2 nm | |
| Magnification | 1,300-4,600,000x | |
| Maximum field of view | 105 μm | |
| EDS | ||
| Detector type | Silicon Drift Detector (SDD) | |
| Detector active area | 30 mm2 | |
| X-Ray Window | Windowless | |
| Energy Resolution | Mn Kα ≤ 129 eV | |
| Maximum throughput | 130 000 cps | |
| Hardware integration | Fully embedded | |
| Software | Esprit 2.3 | |
| STEM IMAGE CAPTURE | |
| up to 2,048 × 2,048 pxls/8 bits | |
| TEM IMAGE CAPTURE | |
| Camera | sCMOS |
| Sensor size | 2,048 × 2,048 pixels |
| Digitalization | 16-bits |
| SEM IMAGE CAPTURE | |
| Up to 2,048 × 2,048 pxls/8 bits | |
| MICROSCOPE UNIT | |
| Weight | 220 kg |
| Dimensions (w × d × h) | 780 × 740 × 1450 mm |
| DIAPHRAGM PUMP | |
| Weight | 3 kg |
Dimensions (w × d × h) | 300 × 160 × 200 mm |
ELECTRONICS UNIT | |
| Weight | 50 kg |
Dimensions (w × d × h) | 1400 × 700 × 760 mm |


| POWER CONSUMPTION | |
| Standby mode | 60 VA |
| Operation consumption | 410 VA |
| Maximum consumption | 600 VA |
| MAINS CONNECTION | |
| Voltage / frequency | 100 – 240 V / 50 – 60 Hz |
| INSTALLATION BENEFITS | |
| No cooling water needed | |
| Only single phase plug needed |